High-purity tungsten hexafluoride (WF6), generally with a purity specification of 5N-6N, is a colorless gas. Mainly used in the deposition of integrated circuits (LOGIC/DRAM/3D NAND). High-purity tungsten hexafluoride with a purity of 5N or 6N is mainly used in the large-scale integrated circuit chemical vapor deposition process. The characteristics of melting point.
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