Molybdenum electrodes are widely used in the semiconductor industry. Here are some major application scenarios:
Coating Electrodes: Molybdenum electrodes are commonly used as anodes and cathodes in the coating process. In semiconductor manufacturing, coated electrodes are used in processes such as thin film deposition, etching, and electrochemical machining. The high melting point, corrosion resistance and chemical stability of molybdenum electrodes make them ideal for many coating processes.
Contact electrodes: Molybdenum electrodes play a key role in the contact structure of semiconductor devices. For example, molybdenum electrodes can be used for metal-silicon nitride contacts, metal-aluminum nitride contacts, and metal-polysilicon contacts, among others. The low contact resistance and excellent thermal stability of molybdenum electrodes make them a common material choice in high-performance semiconductor devices.
Thermal diffusion shielding: Molybdenum electrodes can also be used as thermal diffusion shielding materials in the manufacturing process of semiconductor devices. Thermal diffusion shields are used to control and limit the diffusion of materials to ensure device performance and stability. Molybdenum electrodes have a low impurity diffusivity and high melting point, making them an effective shielding material.
Substrate: Molybdenum electrodes are often used as substrate materials for semiconductor devices. During the silicon wafer preparation process, molybdenum electrodes can provide stable substrate support and improve the mechanical strength and stability of the device.
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